Hi, I am attempting to measure film thicknesses of sputter coated gold with ellipsometery. Although i cleaned the silicon with phirana and measured the oxide layer before sputter coating the substrate, the numbers i got did not match the model. Does anyone know the index of refraction for sputtered gold?? How do sputtered layers behave optically compared to ebeam evaporated layer?? Any reference book would also help. currently i am using .4666-2.4083i for the index of gold thanks adrian