Hi.

Contact Perry Genova at IEP Group in North Carolina: (919) 787-8666.  They
do wafer/MEMS polishing.



At 12:05 PM 7/6/98 -0500, you wrote:
>Dear friends,
>
>I am looking for a place to get done CMP (Chemical Mechanical
>Polishing) of a small number (10-20) of 4" silicon wafers covered with
>1um film of silicon nitride. I want to remove 50-100nm of silicon
>nitride.
>
>I would greatly appreciate your input.
>
>Thanks,
>Dragoslav Mitrinovic
>
>