Dear Sir, I've used 3 types, two extensively and one a little. 1. vem 2. magic 3. L-Edit I vote vem the best for MEMS. Magic isn't very good for MEMS as its design rules are for circuits and MEMS designs are often in violation of proper circuit design rules. Vem is more interactive in the sense that you can tailor it more readily to your needs. There are many advantages for MEMS that I won't go into here. L-Edit has just started being used in our lab and I haven't used it enough for a real comparison with vem, but some here like it and say they like it more than vem. I've used Auto-Cad for things, but never for mask layout. -------------------------------------------------- Beverley EyreMEMS Research Laboratory 54-148 Engr. IV UCLA School of Engineering and Applied Science Los Angeles, Ca. Phone: 310-825-0430 FAX: 310-206-8495 -------------------------------------------------