laser dicer

chengzhengxi
2006-08-15


·¢¼þÈË£º Song Wuzhou
·¢ËÍʱ¼ä£º 2006-08-12 12:31:14
ÊÕ¼þÈË£º mems-talk@memsnet.org
³­ËÍ£º
Ö÷Ì⣺ [mems-talk] how to dice the silicon wafer?

Dear. all
   I have some trouble with dicing the silicon wafer after release. The
release is done using back hole open. Could you give me some suggestion?
Thanks!

Regards
Wuzhou