durusmail: mems-talk: Gas mixing chamber
Gas mixing chamber
2006-08-23
2006-08-24
2006-08-24
2006-08-24
Gas mixing chamber
amron gary
2006-08-23
Hello:

I have a 10"x1" gas mixing chamber. My diffusion gases
are N2 and C2H2. Currently, gas mixing chamber is at
ambient. I want to keep the temperature of my gas
mixing chamber around 100 deg C in order to have
better diffusion of gases before they go to the PVD
chamber. Are there any heaters or heating techniques
that I can use outside my PVD to keep this gas mixing
chamber hotter than ambient? Thanks in advance.

Gary
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