durusmail: mems-talk: piezoresistive sensing
piezoresistive sensing
2006-08-25
2006-08-25
ZrO2 substrate
2006-08-26
piezoresistive sensing
T Zhu
2006-08-25
Dear all:

I am doing research on piezoresistive sensing issues, specipiclly, for
the mechanical mixer applications, but in my knowledge, up to date, the
piezoresistive approach is DC and for low frequency. But i am target at
20MHz, is that possible for piezoresistive sensing approach?

Anyone got some advice on that,or suggest some literature for me?

Thanks very much indeed.

TT
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