Do you get evidence of a p-n junction if you omit the SiO2 step? Evidence of a p-n junction might be obtained by four-point probing, bevel&stain, or spreading resistance. Regards, Roger Brennan Applications Director Solecon Labs 770 Trademark Drive Reno, NV 89521-5926 roger@Solecon.com 775-853-5900 ext 108 -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On Behalf Of Tao Sent: Thursday, August 31, 2006 2:30 PM To: General MEMS discussion Subject: [mems-talk] Diffusion mask Dear ALL, I have some problems with doping boron. I use PECVD silicon di-oxide (500-600nm) as a diffusion mask. The procedure is that 1) Spin Borofilm 100 on wafer (N-type, 2-5 ohm cm) 2) Diffusion at 1000 degree C for 30min 3) Clean the source, and annealing at 1100 degree C for 2hours. After these steps, I find there is no pn junction. So I guess it might be the problem of diffusion mask. Does anyone have experience with that? The recipe of PECVD SiO2 is: Ar : 10sccm O2: 20sccm MicroWave : 300W RF power: 0W Chunk Temperature: 19 degree C pressure: 20mT