Dear Chan These change from manufacturer to manufacturer. The base is usually silicon. If there are bubble jet, silicon thru supply holes and with etched bubble chambers, reservoirs and sputtered/ evaped / cvd heaters and conductors , then you have nozzle plates from different materials. If you really are into MEMS, take some time and each time you replace one, before throwing it away, inspect it under a microscope, force off the nozzle layer and inspect both parts. It's fascinating and changes from time to time. Shay -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of K A Chan Sent: Tuesday, September 19, 2006 3:17 PM To: General MEMS discussion Subject: [mems-talk] Inkjet printer head fabrication Dear all, I would like to learn about inkjet printer head fabrication and technique. Does anyone have any information such as materials used, processes, methods etc..in this area?