Yes, this is a very strong GaAs etchant.
Brad

On 9/26/06 7:02 AM, "ahajjiah@vt.edu"  wrote:

> Vinay,
> Does this etch etch thourgh GaAs or AlGaAs?
> Ali
>
>
> Quoting Vinay :
>
>> Hi Ali,
>> One possible recipe to etch Ti is:
>> 20H2O(DI) : 1HF : 1H2O2.