Ali, Your gold etch rate seems very slow. We typically etch through several thousand angstroms in 2-3 minutes. Perhaps your etchant is old or too dilute. Transene makes a commercial gold etch. Brad On 9/25/06 11:54 AM, "ahajjiah@vt.edu"wrote: Dear MEMS, 2) using KI/I2 etch for gold and then using the HF to etch Ti. The etch rate on this one is very slow, 8A/min. and as a result, my photoresist can't hold against the etch because it will take me at least 15min to etch through the gold.