durusmail: mems-talk: Wet etching of PMMA Wafers
Wet etching of PMMA Wafers
2006-09-25
2006-09-27
Wet etching of PMMA Wafers
abhaya joshi
2006-09-27
Hi vishal ,
for PMMA wet etching. we can try with acetone. But it will be usafull if you
give clear information about your process. with acetone we can not get sharp
edges.
-abhay joshi
university of pune
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