I think you mean GBL rather than PGMEA? I have doubts as to whether a 5-10nm layer is possible via spin-coating (I have never heard of anyone trying this). The following thread may be useful: http://mail.mems-exchange.org/pipermail/mems-talk/2006-January/139480.html stefano.park@gmail.com wrote: > Hi guys > > I would like to make 5-10 nm thickness of SU-8 solution so that I am > going to dilluted with PGMEA. > > What do you think the ratio bewteen SU8-2002 and PGMEA for the 5-10nm > thickness?