Hi all, > One paper you might find interesting is Aqueous KOh etching of silicon > (110), By Byungwook kim. journal of Electrochemical society, vol 145, no. > 7 july 1998. email me if you can't find the paper and i can send the pdf. i indepently found it, it's an interesting reading! Anyway i could not find nothing else related to corner compensation on (110) silicon wafers! > new simulation tool Etch3D by coventorware can tell you how the wet > etching will go on different orientations. it seams it's a nice software, but it also seams that it is not able to automatically design corner compensation features. I think it would be useful a software with the ability to automatically design compensation structures...Does anyone know a software with this feature ? Best regards, Andrea