durusmail: mems-talk: TMMF/TMMR
TiSi2 processes?
2006-11-21
TMMF/TMMR
2006-11-23
TMMF/TMMR
Lujun Zhang
2006-11-23
Hello all

we are going to try permanent photoresist TMMF/TMMR. Does anybody have any
experience with that material? How is the mechanical strength of the dry
filmresist over microchannels. What kind of laminator do you use? And do you
know how toxic this material and the developer will be?

Best regards
Lujun

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