Dear Mems Community,

I am in the process of forming the optical cavity in micro-cavity GaAs/AlGaAS
lasers by wet and/or dry etching? As a result, i would like to know how to form
a smooth/vertical optical cavity? If anybody has some experience in doing so, it
would be appreciated if he/she can give me some hints on how to proceed. In
other words, What are the optimum processing conditions to get a smooth and
vertical optical cavity?

hope to hear from you soon, and thank you for your time.

Have a nice day

Ali