Your question requires some clarification, as glow discharges are generally
not in thermal equilibrium.  Temperatures within such a discharge range from
near ambient for neutral species to electron temperatures >1000 degC.

Roger Shile

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of yilei zhang
Sent: Friday, December 08, 2006 10:19 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] DRIE plasma temperature

Hi all,
Does anybody know the general temperature of plasma used in commercial DRIE?
Or any good references about DRIE etch process? Thanks a lot.