hi guyes,
i am having a problem.
i am doign lithography on surface, which is having 20um deep cavities. i
have to put photoresist on that.but while doing lithography the photoresist
at corner (at top surface).
i am using positive resist S1813 and spinning at speed of 3000RPM.
can anybody tell me what is the problem?
-abhay joshi
university of pune.