I want to push some very tiny foils of AL on a substrate for the distance of a few micrometer. The friction force is around 5 to 20 uN. I will use a vision system to feedback the position and control pushing over time. To do so, I am urgently looking for a *comb-drive micro-actuator* (or any other type of electrostatic microactuator) which can deliver me forces in the needed range. Any one can give me any idea where to find one? Or any research lab who can sell or loan me for a short time their microactuator which has a tip accessible for pushing? I do not want thermal actuation as I need to do a controllable pushing. Any help?