durusmail: mems-talk: How to clean PDMS or PLGA thin film on the Si chip
How to clean PDMS or PLGA thin film on the Si chip
2007-01-10
2007-01-11
How to clean PDMS or PLGA thin film on the Si chip
欢黄
2007-01-10
Hi, I have tried several ways to clean the PDMS thin film on the Silicon
pattern(including HF, Piranha,etc). But the result is not good and
especially I want to clean the PDMS in the hole of Si chip. Does anybody
know how to clean it or any paper mentioned the way of cleaning? Thank you
very much!!

Eddie.
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