Dear MEMS community, I am using Al Pad etchant to release a MEMS device in which a 3 micro LPCVD SiO2 is used for sacrificial layer. My problem is the Al pad etchant attacked the Al pad at a rate about 1 nm/min. I need a release of 500 min to extremely remove the sacrifical layer,and does anybody has better idea to protect the Pad? Thanks in advance. ------------------------------ Sincerely yours, Qiao-Da-Yong Northwestern Polytechnical University M/NEMS Lab. P.O. Box 638, No.127 West FriendShip Road, Xi'an P.R. China ZipCode:710072 Tel£º86-029-88460353-8112 E-mail£ºdyqiao@nwpu.edu.cn