hi,
could anybody share with me her/his nitride etching recepie please?!!! wish to
etch away ~200nm of nitride (SiNx) from a polymer substrate!
cheers
dadhichi
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Dadhichi Paretkar
Department of Materials Science & Metallurgy
Nanoscience Centre
University of Cambridge
11. J J Thomson Avenue
Cambridge  CB3 0FF
+44 1223 760314/13
email: drp32@cam.ac.uk