Dear Mems Members,
We are looking for a system for testing mems under gas flow.
The system requirements are :
possibility to use point probes in a vacuum chamber.
possibility to introduce different gas concentration (NO2 or NH3 for
example)
computer controlled system
Could you give me any company name that could develop this kind of systems?
Thank you very much.

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Paolo Bondavalli
Nanostructures Electroniques, Nanocarb
THALES RESEARCH AND TECHNOLOGY
Route Departementale 128
F91767 Palaiseau Cedex
(FRANCE)
Tel : 01 69 41 58 83
Fax : 01 69 41 57 38
Email : Paolo.Bondavalli@thalesgroup.com