PZT can be etched using hydrofluoric acid (HF) (+ HCl+H2O) ________________________________ From: Dr Nicolas Felix [mailto:n.felix@vermon.com] Sent: Sun 28/01/2007 22:27 To: mems-talk@memsnet.org Subject: [mems-talk] best etching for PZT I'm looking for dry or wet etching of PZT piezoceramics, do you have any idea or references for this particular topic. Regards Nicolas