Hi, I am trying to build a MEMS device, which comprise a 2-arm in-plane mechanical cantilever made of SU-8 2050. After patterning the SU-8 2050 cantilever and prior to developing the photoresist, I will evaporate about 80nm gold film on the SU-8 2050 cantilever. The gold film is to form a bridge between the edge of the cantilever and another SU-8 post. The idea is to use the cantilever to rupture the gold film. I suppose that the rupture mechanism is using the poor adhesion strength between gold & SU-8 (4.8MPa) or breaking strength in the suspended gold bridge. Can anyone advise me if this method can be used to break or rupture the gold film? Mr. Jeffrey Mun Pun YUE Division of Bioengineering Block E3, #05-18, Nanobioanalytics Lab 9 Engineering Drive 1 National University of Singapore Singapore 117576 Tel: (65) 65165985, Fax: (65) 68723069 E-mail: g0500396@nus.edu.sg