durusmail: mems-talk: Sticking paterned PDMS on 100 um channels with some precision?
Sticking paterned PDMS on 100 um channels with some precision?
Sticking paterned PDMS on 100 um channels with some precision?
Petru Lunca Popa
2007-03-19
Hi
I am trying to stick some PDMS 3 mm thick with some 100 um channels on
top of some channels on Si with AU  same width . The distance between
channels is 80 um . Any ideea hoe to proceed to have a good precision?
The length of PDMS piece is 24 mm by 3,75 mm so I have to be careful
at bending of the PDMS while manevrating

Thanks
Petru
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