durusmail: mems-talk: Spinning SU-8 on Kapton Tape
Spinning SU-8 on Kapton Tape
2007-03-19
Spinning SU-8 on Kapton Tape
Karthik Kumar
2007-03-19
Hi,

I'd like to know more about spinning SU-8 on Kapton tape. I'd like to use
the SU-8 as a mask for Cu metal evaporation. Typically, are problems
expected in adhesion, or spinning the resist on Kapton film, or in
developing? Also, will I need a seed layer for adhesion of Cu to the Kapton?
Please write in with suggestions and user experiences. Thanks!

Regards,

Karthik Kumar
Graduate Research Assistant
Zhang Research Group (Micro and Nano-scale Bio-Manipulation, Imaging and
Sensing)
Microelectronics Research Center
The University of Texas at Austin
Austin, TX 78758 USA
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