The laser made transparencies used for making PCB's can get pretty good results down to 25u line spaces or 25u Dia holes. You can go down lower but the edge quality is bad. Even better results can be used once the transparencies are process with extra care - longer bake, standing times etc, but most houses won't do it. Shay -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Jesse D Fowler Sent: Friday, May 11, 2007 4:07 AM To: J.J wang; General MEMS discussion Subject: Re: [mems-talk] Photolithography Transparency Vendor Every transparency I've ever tried, including ones that claimed high resolution, could not hit 10 um. The best I could consistently get was 40 um. So, if anyone has experience with better quality, please let me know, too. Jesse Fowler