Try the RCA clean, also sometime referred to as SC-1 and SC-2 clean (but
skip the native oxide strip obviously, don't want HF near your wafers).
An example reference for the RCA clean would be,

http://www.ece.gatech.edu/research/labs/vc/processes/rcaClean.html#mixOr
g

Googling it will give you lots more info. Enjoy,

Mathieu