Hi, I am currently fabricating AFM cantilevers out of SOI wafers. The biggest problem in the process is still the through wafer etch with KOH 22.5%, 55C that destroys the resulting fragile membranes of SiO2 (1um) just before the release (breaking). Does anybody know of tricks for setups etc. how to avoid membrane failure in a liquid KOH bath? Membranes are about 3x1.5mm each. Thanks! Benedikt Zeyen. -- Benedikt Zeyen bzeyen@umail.ucsb.edu