Seung-Seob Lee, then a PhD student in BSAC of UC Berkeley has
worked on PZT on silicon based microphone and microspeakers. He
was under the advisory of Prof Richard White (If not Prof.
Richard Muller) and have graduated for a couple of years.  Seung
or his advisor can tell you more of whether or why microphones of
that technology are not being pursued.

Patrick Cheung, research scientist   Xerox PARC, MS 35-1674
(O) 650-812-4338 (FAX) 650-812-4334   3333 Coyote Hill Road
pcheung@parc.xerox.com                  Palo Alto, CA 94304
>>                                                       >>
>>                                                       >>

On Wed, 15 Jul 1998, Le Touze Christophe wrote:

This is a multi-part message in MIME format.
--------------A21130FE14E3A0340170D162
Content-Type: text/plain; charset=us-ascii
Content-Transfer-Encoding: 7bit

Among the different kinds of micromachined silicon microphones
dedicated to human speech, we are interested in the
piezoelectric type using thin film PZT (lead zirconate titanate)
piezo-electric ceramic.
    But it seems that PZT films on Si-wafer are mainly used as force
sensors, ultrasonic micro-actuators, acoustic imaging or sonar
transducers.
    Is there any particular reason to explain this?

    Please send me any suggestion on that subject.
 Thank you !
   Christophe LE TOUZE.

--------------A21130FE14E3A0340170D162
Content-Type: text/x-vcard; charset=us-ascii; name="vcard.vcf"
Content-Transfer-Encoding: 7bit
Content-Description: Card for Le Touze Christophe
Content-Disposition: attachment; filename="vcard.vcf"

begin:          vcard
fn:             Le Touze Christophe
n:              Christophe;Le Touze
email;internet: 870112@mrl.itri.org.tw
x-mozilla-cpt:  ;0
x-mozilla-html: FALSE
version:        2.1
end:            vcard


--------------A21130FE14E3A0340170D162--