durusmail: mems-talk: lithography using su8 and mask
lithography using su8 and mask
2007-06-13
lithography using su8 and mask
Sabri Mahdaoui
2007-06-13
Hi everyone,

I am a French student doing a project in London, I am trying to fabricate a
micromixer with grooves using two layers of su8 deposited one after the
other on a glass wafer. The dimension of the channel are around100 microns
in both cross-sectional directions. I got all the different steps of the
fabrication figured out.
However I have a few questions for you.

Where can I buy rectangular glass wafers? Do I need circular wafers when I
spin coat the su8?
What do alignement holes look like on the mask, knowing that the mask is
simply made by printing a scheme on a transparent sheet?
Could someone provide me with an example of a negative mask used for shining
UV light on su8 (if possible with alignment holes)?

I am sorry if my questions seem a bit simple. I am starting this experiment
form scratches.

Sincerely,
Sabri Mahdaoui
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