durusmail: mems-talk: Q-factor
Q-factor
1998-02-12
Q-factor
JIAO J.
1998-02-12
Hello:

We're working on YAW rate sensor with a resonant struture sealed in
vaccum. Before the sealing, Q-factor was about 1000~2000; however, after
sealing, it decreased to only about 100. Is there anybody had such an
experience or know how to find a way out? Any comment is appreciated
indeed.

Later,

JIAO


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