Hi Josh

How would be your evaporation rate?! so high?! Could it be an evidence
for noncontiguous deposition (some regions thicker than others over
your substrate). If your film is not so uniform, its resistivity will
be given by thinner regions. But it is only a fast kick, a don't know
if there are some kinds of interdifusion problems or else on your
system. If you really have a heterogeneous film, I think probably the
thermal features will be affected too.

Best wishes

NH