Josh, A couple things come to mind. If your substrates substantially heated during the process then I'd say there's a good chance that you're getting significant interdiffusion between the Pt or Ti (I don't have a phase diagram in front of me but I'd bet there's decent solubility in at least the Ti-Pt system), this can cause a substantial rise in resistivity. Second if your original model is using bulk resistivity then it assumes large grain structures which have better (lower) resistance, evaporated material will often have smaller grains and higher resistances though a factor of 8 seems a little high for this to be the only reason. Good luck, Matt -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Josh Sent: Sunday, July 01, 2007 2:32 AM To: mems-talk@memsnet.org Subject: [mems-talk] ebeam evaporated metal's properties Dear all, I met a problem of electrical resistivity rising. My measured resistance of metal layers (80 nm Pt or Au plus 20 nm Ti as adhesion) was 8 times higher than my calculation using literature data. I deposited them using e-beam evaporator without breaking the vacuum. My questions are: (1) Is it normally? Any possible reason(s) for this variation? It is highly appreciated if you can provide any publication regarding this issue. (2) Will the mechanical properties of the metal films, especially specific heat change also? what is the trend of possible change?