Dear Kris, The paper titled as "Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution" by Iliescu et. al; Surface & Coating Technology 198 (2005) 314-318 might be helpful. For our case we use Cr/Au/Cr/Au mask with pure HF for glass etching but we do not deeply examine the surface roughness which is not the important parameter for our application. Regards, -- Kagan TOPALLI, Ph. D. Senior Research Engineer MEMS-VLSI and EMT Group Middle East Technical University Dept. of Electrical & Electronics Eng. TR-06531 Ankara Turkey Phone: +90 312 210 44 09 or +90 312 210 23 40 Fax: +90 312 210 23 04 http://www.mems.eee.metu.edu.tr/ http://www.eee.metu.edu.tr/~emt/ -- ----- Original Message ----- From: "kris"To: Sent: Monday, July 16, 2007 3:46 PM Subject: [mems-talk] Glass etch > Hello, > > I am trying to etch glass using Cr/Au mask. I want to > know the etchant which provides the smooth surfaces. > > Also, Can you let me know the etchants for borofloat > and pyrex glasses. > > Thanks, > Kris > > >