Hello Everyone, I have a superlattice structure with following layers in the order: Au Cr PECVD oxide (135 nm) Si/SiGe SL (0.5 um) SiGe/SiGeC buffer (1 um) Si wafer I want to remove Au, Cr and PECVD oxide layers. I was wondering if anyone could suggest me on what etchants to use so that they selectively remove Au, Cr and PECVD oxide layers but not the other layers. Thanks, Nitin Shukla PhD Candidate Nanoscale Energy Transport Laboratory Department of Mechanical Engineering Virginia Tech Blacksburg, VA 24061 Tel No: 540-231-5579