Hi, I am trying to use the VHF-PECVD to plasma(oxygen) treat pdms and glass, to bond them. So far, I have had no luck. We have treid (25mtorr, 25w, 2min), (25mtorr,25w.10sec) and (25mtorr,25w,10min). None of these seem to help. Can any of you suggest what might be the right parameters. Thanks in advance Vishwa