The following short professional course in July 1995 will be of interest to the MEMS community. MICROSYSTEMS: Mechanical, Chemical, Optical Massachusetts Institute of Technology Cambridge MA 02139 4-1/2 Days Monday - Friday, July 24-28, 1995 Instructors: Stephen D. Senturia (MIT) Martin A. Schmidt (MIT) Jed Harrison (U. of Alberta) Tuition: $1,800 Course Description: Rapid advances in microelectronic technology have created opportunities for increasing the capabilities of microfabricated transducers and microelectromechanical sytstems (MEMS), and for lowering their cost. This program addresses this field from several points of view: (1) microsensors and microactuators as components of microsystems, (2) microfabrication technologies, including both conventional integrated-circuit technologies and enhancements to those technologies such as "micromachining", and (3) device packaging as a crucial aspect of device design. A set of real case studies, drawn from mechanical, chemical, and optical microsystem applications, including pressure sensors, accelerometers, microvalves and micropumps, chemical sensors, fluidic chemical analysis systems, and micromechanical optical devices are used to demonstrate the subject matter and the various interrelated constraints on technology and device design. Advanced CAD tools (the MIT MEMCAD system) are used to illustrate selected examples. Upon completion of the course, participants will be familiar with the state of the art in the MEMS field, and will be prepared to apply critical judgments about technology, packaging, and system issues to their own potential applications. Participants receive complete lecture notes, a book of selected reprints, and design examples. Extensive use is made of video demonstrations. Tours of MIT fabrication and MEMS research facilities are included. A complete on-line course description can be found on the World-Wide-Web at http://web.mit.edu/afs/athena/org/s/summer-programs/www/engineering/6.77s.html For further information, please contact: Director of the Summer Session MIT Room E19-356 Cambridge, MA 02139 Tel. (617) 253-2101 Fax (617) 253-8042 e-mail: summer-professional-programs@mit.edu WWW: http://web.mit.edu/org/s/summer-programs/ or Stephen D. Senturia MIT Room 39-567 Cambridge MA 02139 Tel (617) 253-6869 Fax (617) 253-9606 e-mail: sds@mtl.mit.edu