durusmail: mems-talk: Photoresist as etch mask!
Photoresist as etch mask!
2007-10-01
2007-10-02
2007-10-02
Photoresist as etch mask!
Nitin Shukla
2007-10-01
Hi,
  I would appreciate if anyone could suggest me a photoresist that would not be
etched by TMAH or KOH.

  Thanks,
Nitin Shukla


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  Nitin Shukla
  PhD Candidate
  Nanoscale Energy Transport Laboratory
  Department of Mechanical Engineering
  Virginia Tech
  Blacksburg, VA 24061
  Tel No: 540-231-5579
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