Hello,

After undergoing a 1um wet oxidation @ 1050C, I notice a haze pattern on my
silicon wafers. Sometimes there is ring of haze around the wafer edge while the
center is clear. Other times, the center has haze while the edges are clear.

It is only visible under a strong white light.

Has anyone seen this occur on their wafers? Or come across literature that
discuss this?

Thanks a lot,

Shivalik