You use E-beam to evaporate an thin oxide layer. I doubt about the use of hydrogen peroxide because it probably won't give you layer thick enough as you required. Ning Wu The Department of Chemical Engineering Princeton University New Jersey 08544 ----- Original Message ----- >From "memser"Date Tue, 30 Oct 2007 21:26:57 +0800 To "mems-talk@memsnet.org" Subject [mems-talk] get a thin oxadation layer Hello all, I'd like to get a thin oxadation layer (100-500A) on the surface of my structure, but thermal oxidation is forbidden for its high temperature (lower than 300 ¡ãC is OK). Now, I want to dip the whole wafer into hydrogen peroxide (H2O2) or put it into oven (120 ¡ãC) for a while. Are these method available? If not, is there any other methods to achieve such a thin oxadation layer (100-500A). Does anyone has experience to to this? Thanks a lot. Best wishes! X.Yan memser@tom.com