Hello,
        We need to etch( anisotropic ) Si using Ethylene Diamine + Pyrocathechol
We have procured the chemicals in sealed bottles WITHOUT the saftey /
handling instructions. I would appreciate if somebody could help us
either by giving a reference or the instructions themselves.
        The crunch is heating the mixture to 80 deg C using a reflux system.

Regards
NK Choudhary


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