Hello Michael, in my experience it is possible to etch Chromium in an O2-Plasma as long your wafers can stand temperatures > 190°C. Chromium should build at those temperatures volatile CrO3 and disappear. Best regards, Martin Lapisa Microsystem Technology Laboratory Royal Institute of Technology (KTH Stockholm) -----Original Message----- From: Michael D Martin [mailto:michael.martin@louisville.edu] Sent: Donnerstag, 29. November 2007 17:09 To: mems-talk@memsnet.org Subject: Re: [mems-talk] Chrome Plasma Etching without Cl? If your Cr layer is thin you might be able to just sputter it off, even with oxygen. -Michael Martin U. of Louisville