durusmail: mems-talk: selective etching of p-AlGaN from i-AlGaN
selective etching of p-AlGaN from i-AlGaN
2007-12-16
selective etching of p-AlGaN from i-AlGaN
Yuzhu Li
2007-12-16
Hi, p-type AlGaN was grown on i-AlGaN, how to selectively remove p-type
AlGaN from i-AlGaN? Prefer dry etching, but wet etching is also OK. Please
give reference, thanks.



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