Hello Anh, Depending on your temperature window, you have a variety of choices for eutectic bonding for MEMS: AuSi, AuSn, AuIn, AuGe being some of the commonly used eutectic systems) Here are a couple of papers that will give you a headstart on the various eutectic bonds; ENCAPSULATION OF VACUUM SENSORS IN A WAFER LEVEL PACKAGE USING A GOLDSILICON EUTECTIC and other papers from Najafi's group at U Michigan are good refs for AuSi eutectic bonds Kim et al, Application of Au-Sn Eutectic Bonding in Hermetic RF MEMS Wafer Level Packaging, 9th Int'l Symposium on Advanced Packaging Materials, 2004 Adhesive wafer bonding-[Journal of Applied Physics 99, 031101 (2006)] (This is a review paper on Adhesive bonding but the first few sections discuss and refers to various eutectic and metal bonds) Thanks Sumant Sood Bonder Applications SUSS MicroTec Inc. -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of anh_tuan.tham@pcm.endress.com Sent: Friday, January 04, 2008 1:59 AM To: General MEMS discussion Subject: RE: [mems-talk] Need recommendation on good book on bonding. Hi Brad, I'm interested in Eutectic Bonding for MEMS. Can you be so kind giving me some good refs on this subject.