Dear MEMS
 I have worked (110) silicon wafer KOH etching  verticaly for
acceleration sensor.
  But vertical KOH etching was not conformed. I want to know the
method for  vertical KOH etching.
  I wish your advices and good informastions.
 Thanks for reading my e-mail.
email adress; mhnam@palgong.kyungpook.ac.kr