durusmail: mems-talk: conductivity of SiO2 layer grown on top of heavily
conductivity of SiO2 layer grown on top of heavily
2008-01-09
conductivity of SiO2 layer grown on top of heavily
Seongmu Heo
2008-01-09
Hi Wenlin,

Whichever you take wet or dry oxidation,
the SiO2 layer will not be electrically conductive.
and the insulating quality depends on the oxide quality and the layer thickness.

Best Regards,
SM
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