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TaN and IrO2 etching
TaN and IrO2 etching
2008-01-10
schahrazede.mouaziz@epfl.ch
2008-01-22
Kvel Bergtatt
TaN and IrO2 etching
schahrazede.mouaziz@epfl.ch
2008-01-10
Hello, Does anyone know how to etch (wet or dry) TaN and IrO2? Best regards,
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