durusmail
:
mems-talk
:
Dry etching of polyimide with PR mask
Dry etching of polyimide with PR mask
2008-01-09
Zotl Ernst
2008-01-10
Jason Milne
2008-01-09
Nodes Norbert
2008-01-10
Zotl Ernst
SIMOX wafer characterization
2008-01-10
Andrea Mazzolari
Dry etching of polyimide with PR mask
Zotl Ernst
2008-01-10
Thanks for the input! Yes, the pads are floating, they are deposited on glass substrates.
reply