durusmail: mems-talk: Dry etching of polyimide with PR mask
Dry etching of polyimide with PR mask
2008-01-09
2008-01-10
2008-01-09
2008-01-10
SIMOX wafer characterization
Dry etching of polyimide with PR mask
Zotl Ernst
2008-01-10
Thanks for the input!
Yes, the pads are floating, they are deposited on glass substrates.

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