durusmail: mems-talk: Polyimide and Parylene Ionic conductivity
Polyimide and Parylene Ionic conductivity
2008-01-11
Thin SOI wafers
Polyimide and Parylene Ionic conductivity
Michael D Martin
2008-01-10
We're working on a biomems application where we are relying on the high
electrical resistance of polyimde in an ionic aqueous environment (1M KCl).  We
have found though that the bulk resistivity of PI-2611 in this solution is only
8.3 x 10^11 Ohm-cm vs. the published value from HD Microsystems of >10^16 Ohm-
cm!  We see a similar affect on parylene .  Can anyone comment? Have you seen
this before?


Thanks in advance,
   Michael Martin
   U. of Louisville


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